PRODUCT

  • PRODUCT
  • In-line PVD

In-line PVD

In-line system is optimized for large-scale, high-capacity, and low-cost applications.
Thin film is deposited on the substrate as the carrier passes linearly through multiple sputter cathodes.

  • In-Line Sputtering System
    (For Power Semiconductor)

    • World First AMB Tool for Mass Production (Thin Film)
    • High Productivity
    • Double-Sided Sputtering
    • Linear Moving Magnet Transfer
    • Vacuum Maglev Transfer Module
      - Low Vibration and Low Particle
      - Precision Control
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