COMPANY

  • COMPANY
  • History

2025

  • 02 Supply of 12" Single Cluster Sputtering System NxT-300S PVD
  • 03 Development of In-Line Sputtering System for Power Devices
  • 04 Order for In-Line Sputtering of Power Device Heat Dissipation Substrates (AMB)
  • 05 Supply of NxT-320 PECVD for 12" AlF Coating

2024

  • 04 Supply of BACO NxT-200 PVD for 8" Thin Wafe
  • 05 Supply of BACO NxT-200 PVD for 8" Power Device (European Market Entry)
  • 06 Supply of BACO VMA-100 & VMA-150 PVD for 4" & 8" (Overseas ODA Project)
  • 08 Development of 12" Single Cluster Sputtering System NxT-300S PVD

2023

  • 03 Development of BACO NxT-320 PECVD for 12" AlF Coating
  • 04 Supply of BACO NxT-200 PVD for 8" Smart Probe Card Mass Production
    Supply of BACO NxT-200 PVD for 8" SiC Power Device Mass Production
  • 04 Execution of National Projects: Super Gap Startup 1000+ (’23–’25)
    Execution of Next-Generation Intelligent Semiconductor National Projects (’23–’25)
  • 05 Development of Sputtering System for Carbon Process
    Development of EUV Blank Mask Ion Beam Deposition System

2022

  • 02 In-House Development of 6" & 8" Platform
  • 03 Development of Mass Production Equipment for Power Devices
  • 04 Launch of BACO NxT-200 & NxT-200S PVD Models for 8" Mass Production
    Development of New Software & Scheduler
  • 05 ISO 9001:2015 Quality Management System Certification
    ISO 14001:2015 Environmental Management System Certification

2021

  • 02 Supply of BACO xT-200 PVD for 8" Bumping Mass Productio
  • 03 Certified as a Corporate Research Institut
  • 04 Certified as a Materials, Parts, and Equipment Specialized Company

2020

  • 02 Supply of BACO xT-300 PVD for 12" DDI & WLP Process Mass Productio
  • 03 Certified as a Venture Business
  • 04 Supply of BACO xT-200S PVD for 8" Smart Probe Card Mass Production
  • 05 Development and Supply of Y₂O₃ RAS Sputter
  • 07 Certified as an Excellent Workplace for Risk Assessment

2019

  • 01 Supply of BACO xT-200 PVD for 8" DDI & WLP Process Mass Production
  • 04 Supply of BACO VMA-i6 PVD for 6" Power Device
    *VMA = Variable Material Application

2018

  • 01 Development of 8" Dual Cluster Sputtering System
  • 02 Supply of BACO xT-200 PVD for 8" DDI & WLP Process Mass Production
    - Process Approval from Samsung Global Foundry Division
  • 03 Signed Contract for Sputtering System Service
    Signed Contract for Cryopump Overhaul
  • 05 Development of BACO VMA-300S PVD for 8" & 12" MCA Chuck Coating
    *VMA = Variable Material Application

2017

  • 01 Process Development for TiW and Au in DDI Applications
  • 02 Development of 12" Dual Cluster Sputtering System
    Development of In-House Software & Scheduler
  • 03 Supply of BACO xT-300 PVD for 12" Bumping Mass Production
    - Process Approval from Samsung and SK Hynix
  • 05 Development of Octa-Magnet Source

2016

  • 03 Incorporation of BACO Solution Co., Ltd.
  • 04 Development of Equipment for TiCN and DLC Coating

2015

  • 02 Process Development for Ti and Cu Applications
  • 06 Development and Supply of In-Line TCO Sputtering System
    (Korea Basic Science Institute)

2014

  • 02 Process Development for TCO and Oxide Applications
  • 07 Development of Magnet Source Usage for Sputtering Systems
  • 11 Development of Sputtering System VMA Source Assembly
    *VMA = Variable Material Application

2013

  • 08 Founding of BACO Solution
  • 10 Started Semiconductor Equipment Business
    VARIAN, AMAT, and NOVELLUS PVD & CVD Systems and Localization of Parts